King Saud Library Book
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King Saud Library Book
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| ISBN: | 0471966827 | |
| ISBN: | 0471966819 | |
| Language codes: | eng | |
| Dewey call number: | 621.38152 S.M. | |
| Title: | Semiconductor micromachining / edited by S. A. Campbell and H. J. Lewerenz | |
| Publication info: | Chichester : John Wiley, 1998 | |
| Physical descrip: | 2 v. ill. 24 cm. | |
| Partial contents: | v. 1. Fundamental electrochemistry and physics. v. 2. Techniques and industrial applications. | |
| Held by: | CENTRAL | |
| Subject term: | Semiconductors--Design and construction | |
| Subject term: | Micromachining | |
| Subject term: | Microfabrication | |
| Added author: | Campbell, S. A. | |
| Added author: | Lewerenz, H. J. | |
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